International Journal of Applied Research
Vol. 2, Issue 5, Part N (2016)
The reverse simulation models for target parameters
Yijun Zheng, Lin Pu, Yu Min and Juyan Xu
Traditional forward simulation, such as SUPREM developed by Stanford University for implantation simulation is of low efficiency. Moreover, it is not able to quantitatively simulating some special distribution, such as the distribution of the maximum concentration gradient at the PN junction depth (XJ) or the quasi-rectangular distribution for material structure modifications. This paper proposes a reverse simulation model for target parameters, which use reverse deduction from expected values and the mathematic method of solving the conditional extremum of multivariable functions. The Implantation Parameters Quantitative and One-shot reverse simulating (IPQORS) the special distribution have been studied in this article. Research results indicate that IPQORS is feasible.
How to cite this article:
Yijun Zheng, Lin Pu, Yu Min and Juyan Xu. The reverse simulation models for target parameters. International Journal of Applied Research. 2016; 2(5): 945-952.